Ibm research and nova jointly awarded the "best metrology paper" at spie advanced lithography conference

Demonstrating in-line raman spectroscopy (nova elipson™) for nanosheet devices rehovot, israel , april 26, 2022 /prnewswire/ -- nova (nasdaq: nvmi) today announced that its co-authored paper with ibm research on "in-line raman spectroscopy for stacked nanosheet device manufacturing" has been selected as the winner of the diana nyyssonen award for "best paper at spie's 2021 advanced lithography symposia." the award was granted to nova and ibm on the opening day of the 2022 conference.
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