Acm research enters bevel etch market to support emerging process steps in 3d nand, dram and advanced logic manufacturing

Wet process offers edge etch and clean to improve wafer yield with high throughput and low chemical consumption; first tool expected to ship during third quarter of 2021 wet process offers edge etch and clean to improve wafer yield with high throughput and low chemical consumption; first tool expected to ship during third quarter of 2021
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