Acm research's 18 chamber, 300mm ultra c vi single-wafer cleaning tool enters mass production

Acm's ultra c vi tool supports most semiconductor clean processes for advanced logic, dram and 3d nand manufacturing; provides 50% more throughput than 12 chamber tool acm's ultra c vi tool supports most semiconductor clean processes for advanced logic, dram and 3d nand manufacturing; provides 50% more throughput than 12 chamber tool
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