Axcelis announces shipments of purion xe high energy and purion h high current implanters to dram memory chipmakers

Shipments support capacity expansions at multiple fabs beverly, mass. , dec. 7, 2023 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today shipments of the purion xe™ high energy and the purion h™ high current implanters to multiple fabs in korea and china to manufacture dram memory devices.
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