Axcelis announces shipment of purion exe power series implanter to leading sic power device chipmaker in japan

Axcelis' leadership in the power device segment continues to grow beverly, mass. , oct. 18, 2023 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced the shipment of the company's purion exe sic power series™ 200mm high energy implanter to a leading sic power device chipmaker located in japan.
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