Axcelis announces shipment of purion dragon™ high current implanter to a world-leading research and innovation center

The system will be used in sub 3 nanometer logic device development beverly, mass. , oct. 10, 2023 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today a shipment of the purion dragon™ high current implanter to a world-leading research and innovation center in nanoelectronics and digital technologies located in europe.
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