Axcelis announces multiple follow on shipments of 'purion m sic power series' implanter to leading power device manufacturers

Beverly, mass., april 14, 2021 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today multiple follow on shipments of the company's purion m™ sic medium current implanter to several leading power device chipmakers located in europe.
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