Axcelis announces multiple shipments of purion h200 sic power series implanters and closure of purion xe sic eval tool

Beverly, mass., jan. 6, 2022 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced follow on shipments in the third and fourth quarters of the company's purion h200 sic power series™ high current implanters to a leading power device chipmaker.
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