Axcelis announces multiple shipments of purion high current, high energy and medium current sic and si power series implanters to leading power device chipmakers

Beverly, mass., feb. 24, 2022 /prnewswire/ -- axcelis technologies, inc. (nasdaq: acls), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced multiple shipments in the first quarter of the company's purion h200™ high current, purion exe™ high energy and the purion m™ medium current power series™  implanters to leading si and sic power device chipmakers.
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